MeasuringRange(测量范围):X-axis:300mmY-axis:200mmZ-axis:150mm MeasuringUncertainty(测量精度):U2(X,Y)=2.0+L/250 mU1 (Z) =2.5+L/250 mResolution(分辨率):0.5 mSystemConstruction(系统构造):Precisionlappedfinegranitebase(精密花岗岩平板)Highprecisioncrosstable(高精密度的十字桌)Moving stage(运动轴承)DriveSystem(驱动系统):Backlashfreeballscrewsthroughmasscenter(探头中心螺丝抗抖动（重液压）)ServomotordriveforCNCof3-axis(DC伺服马达CNC的3轴伺服马达)PrecisionLinearMotionguidesystem(精密线性运动指导系统)PositioningSpeed(传送速度):0 300mm/secMax.acceleration(加速度):500mm/s