机型LSM-500HLSM-501HLSM-503HLSM-506HLSM-512H型号544-552544-553544-555544-556544-558544-559544-572544-573544-575544-576检验标准FDAIECFDAIECFDAIECFDAIECFDAIEC测量范围0.005-2mm0.05-10mm0.3-30mm1-60mm1-120mm最小读值0.00001-0.01mm0.00001-0.01mm0.00002-0.1mm0.00005-0.1mm0.0001-0.1mm重现性?0.04um?0.05um?0.15um?0.5um?1.2um直线性?0.3um?0.5um?1.0um?3m?6um位置误差?0.4um?0.5um?1.5um?4m?8um测量区域1x2mm当0.05-0.1mm时为2X10mm;当0.1-10mm时为4X10mm10X30mm20x60mm30X120mm扫描频率1600回/秒1600回/秒1600回/秒1600回/秒1600回/秒扫描速度38m/s57m/s113m/s226m/s452m/s环境温度0-40℃环境湿度35-85%