TheKXTE9-2050isaTri-axis,siliconmicromachinedaccelerometerwithafull-scaleoutputrangeof+/-2g(19.6m/s/s).TheKXTE9containsintegratedorientationandactivitydetectingalgorithms.ThesenseelementisfabricatedusingKionix sproprietaryplasmamicromachiningprocesstechnology.Accelerationsensingisbasedontheprincipleofadifferentialcapacitancearisingfromacceleration-inducedmotionofthesenseelement,whichfurtherutilizescommonmodecancellationtodecreaseerrorsfromprocessvariation,temperature,andenvironmentalstress.Thesenseelementishermeticallysealedatthewaferlevelbybondingasecondsiliconlidwafertothedeviceusingaglassfrit.AseparateASICdevicepackagedwiththesenseelementprovidessignalconditioning,digitalcommunication,andembeddedlogicfororientationandactivitydetection.Theaccelerometerisdeliveredina3x3x0.9mmLGAplasticpackageoperatingfroma1.8 3.6VDCsupply.AnI2Cinterfaceisusedforcommunicationwiththechiptoconfigureandcheckupdatestotheorientationandactivityalgorithms.