0-150mm 527-201 0.05mm ±0.05mm 527-121 0.02mm ±0.03mm 0-200mm 527-202 0.05mm ±0.05mm 527-122 0.02mm ±0.03mm 0-300mm 527-203 0.05mm ±0.08mm 527-123 0.02mm ±0.04mm 0-600mm 527-204 0.05mm ±0.10mm 0-1000mm 527-205 0.05mm ±0.15mm 0-150mm 527-101 0.02mm ±0.03mm 0-200mm 527-102 0.02mm ±0.03mm 0-300mm 527-103 0.02mm ±0.04mm 0-600mm 527-104 0.02mm ±0.05mm 0-1000mm 527-105 0.02mm ±0.07mm