1794-PS13
1794-PS13
1794-PS13
PLC程序的调试可以分为模拟调试和现场调试两个调试过程，在此之前首先对PLC外部接线作仔细检查，这一个环节很重要。外部接线一定要准确无误。也可以用事先编写好的试验程序对外部接线做扫描通电检查来查找接线故障。不过，为了安全考虑，最好将主电路断开。当确认接线无误后再连接主电路，将模拟调试好的程序送入用户存储器进行调试，直到各部分的功能都正常，并能协调一致地完成整体的控制功能为止。

NOVELLUS 27-262408-00 / I/O CONTROLLER / Software version : IOC V4.20

 

 

NOVELLUS 27-10157-00 / I/O CONTROLLER / Software version : IOC V4.21 / IOC V4.22

 

 

CENTURA / ENDURA 0040-32052, DPS POLY CATH BELLOWS

 

 

AMAT 0190-36497, CHAMBER PNUEMATICS, SOLENOID

 

 

0010-30140 , ASSY,CONNECTOR BOX,HV FILTER,DPS

 

 

AMAT 0190-35390, CHAMBER PNUEMATICS, SOLENOID

 

 

Varian 04-715360-01 C (REV) /System Transfer Computer

 

 

ENI MW-5DM11 RF Impedance Matching Network

 

 

Varian 04-715359-01 A(REV)/Intellig​ent Process computer

 

 

F24069CA, UF3000 Prober, Top plate Docking ring

 

 

AMAT 0021-35163 REV C, Reflector Plate Chamber Bottom

 

 

PARKER SX6-Drive Mircrostep Compumotor Servo Drive, 87-011751-01

 

 

Novellus ASTEX AX7610-5 REV 1L

 

 

VARIAN HIGH VACCUM PPARATUS MFG.INC 422-0319 Slit Gate valve

 

 

Novellus ASTEX AX7610, ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE

 

 

TEL O-RING VITON, AS568-473 BLK, ES027-003420-1

 

 

Kalrez UltraPure AS568A, 8002UP, O-RING