西门子PLC四大常用闭环控制模块精讲

FM 355闭环控制模块   FM 355 有4个闭环控制通道，用于压力、流量、液位等控制，有优化温度控制算法和PID算法。FM 355C是有4个模拟量输出断的连续控制器，FM 355 S 是有8个数字量输出点的步进或脉冲控制器。CPU停机或出现故障后FM 355人能继续运行，控制程序存储在模块中。   FM 355的4个模拟量输入端用于采集模拟量数值和前馈控制值，附加的一个模拟量输入端用于热电偶的温度补偿。可以使用不同的传感器，例如热电偶、Pt100热电阻、电压传感器和电流传感器。FM355有4个单独的闭环控制通道，可以实现定制控制、串级控制、比例控制和3分量控制，几个控制器可以集成到一个系统中使用。有自动、手动、安全、跟随、后背这几种操作方式。12为分辨率时的采样时间为20~100ms，14位分辨率时为100~500ms。   自优化温度控制算法存储在米快中，当设定点变化大于12%时自动启动自由化；可以使用组态软件包对PID控制算法进行优化。   CPU有故障或CPU停止运行是控制器可以独立地继续控制。为此在：“后备方式”功能中设置了可调的安全设定点或安全调节变量。可以读取和修改模糊温度控制器的所有参数，或在线修改其他参数。

Aera FC-7800CD Mass Flow Controller 300 SCCM NF3 Used Working

Aera FC-7800CD Mass Flow Controller 3 SLM O2 Used Working

Aera FC-7800CD Mass Flow Controller 1 SLM N2$ Used Working

MKS Instruments 640B-30202 Pressure Controller Used Working

Tylan FC-2901MOEP Mass Flow Controller AMAT 3030-06253 Used

Unit Instruments UFC-8161 Mass Flow Controller 700 SCCM SiH4 Used

Celerity UFC-1661 Mass Flow Controller 250 SCCM N2 Equivalent Used Working

Aera FC-7810CD Mass Flow Controller AMAT 3030-08153 Used Working

Aera FC-PA7810C-BA Mass Flow Controller AMAT 3030-16524 Used Working

Unit Instruments UFC-1100 Mass Flow Controller AMAT 3030-01114 Used

Aera FC-D981C Mass Flow Controller AMAT 3030-00320 CA-98D9-Z Used Working

Aera FC-D980C Mass Flow Controller AMAT 3030-08683 CA-98D9-Z Used Working

Aera FC-D980C Mass Flow Controller AMAT 3030-08558 CA-98D9-Z Used Working

Aera FC-PA7810C-BA Mass Flow Controller AMAT 3030-16526 Used Working

Aera FC-PA7810C-BA Mass Flow Controller AMAT 3030-16523 Used Working

Tylan FC-2902M-T Mass Flow Controller AMAT 3030-07674 Used Working

Horiba STEC IV-2410AV-02L Injection Valve Used Working

STEC SEC-4400M Mass Flow Controller AMAT 3030-04800 Used Working

STEC SEC-7350MC Mass Flow Controller 10 SLM Ar Used Working

STEC SEC-4400M Mass Flow Controller AMAT 3030-04795 Used Working

Aera FC-PA7810C-BA Mass Flow Controller AMAT 3030-13508 Used Working

Aera FC-PA7810C-BA Mass Flow Controller AMAT 3030-16525 Used Working

Celerity UFC-3165 Mass Flow Controller AMAT 0190-24671 Used Working

Brooks Instrument GF125C-901098 Mass Flow Controller AMAT 0190-32366 Used

Celerity UFC-3165 Mass Flow Controller AMAT 0190-15026 Used Working

Celerity UFC-8565 Mass Flow Controller AMAT 0190-12576 Used Working

Celerity UFC-8565C Mass Flow Controller AMAT 0190-16327 Used Working

Millipore FC-2900V Mass Flow Controller 5 SCCM N2(Ar) Used Working

Brooks Instrument GF125C-916414 Mass Flow Controller AMAT 0190-40283 Used

Horiba STEC SEC-4400M Mass Flow Controller AMAT 3030-12517 Used Working

Horiba STEC IV-2410AV Injection Valve AMAT 3870-04383 Used Working

Unit Instruments 3160-100010 Mass Flow Controller UFC-3160A Used Working

Unit Instruments UFC-1100A Mass Flow Controller 300 SCCM N2 Used Working

MKS Instruments FRCA231B24 Flow Ratio Controller Used Working

Aera FC-PA7820C-6BM Mass Flow Controller AMAT 3030-15732 Used Working

Nikon 4S007-372-1 PCB Control Board AWL CUD Used Working

MKS Instruments P8A007203C6T0AA Mass Flow Controller AMAT 3030-13192 Used

Unit Instruments UFC-1660 Mass Flow Controller AMAT 3030-01906 Used

Celerity UFC-1660 Mass Flow Controller AMAT 3030-12920 Used Working

Celerity UFC-1661 Mass Flow Controller AMAT 3030-15049 Used Working

Aera FC-7810CD Mass Flow Controller AMAT 3030-01857 Used Working

Aera FC-7800CD Mass Flow Controller AMAT 3030-00313 Used Working

Aera FC-D980CB Mass Flow Controller 100 SCCM N2 Used Working

Aera FC-D980C Mass Flow Controller AMAT 3030-09320 Used Working

MKS Instruments 1179A11CR1BV--S Mass Flow Controller AMAT 0190-18037 Used

Unit Instruments UFC-8160 Mass Flow Controller AMAT 0224-43650 Used Working

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11371 Used

Unit Instruments UFC-1660 Mass Flow Controller AMAT 3030-04479 Used Working

Unit Instruments UFC-1660 Mass Flow Controller AMAT 3030-04368 Used Working

Aera FC-7810CD Mass Flow Controller AMAT 3030-08167 Used Working

Aera FC-D980C Mass Flow Controller AMAT 3030-07514 Used Working

STEC SEC-4400MC-RUC-?G2 Mass Flow Controller AMAT 3030-07751 Used

STEC SEC-4400MC-UC-G?2 Mass Flow Controller 500 SCCM N2 Used

STEC SEC-4400M Mass Flow Controller 300 SCCM O2 Used

Unit Instruments UFC-8161 Mass Flow Controller 50 SCCM SiH4 Used

STEC SEC-4400MC-UC Mass Flow Controller 200 SCCM Cl2 Used

STEC SEC-4400MC-UC Mass Flow Controller 200 SCCM Ar Used

STEC SEC-4400MC-UC Mass Flow Controller 200 SCCM SF6 Used

Aera FC-7800CD Mass Flow Controller AMAT 3030-07274 Used Working

Celerity UFC-1661E Mass Flow Controller AMAT 3030-14875 Used Working

Horiba STEC SEC-Z522MGXN Mass Flow Controller AMAT 3030-15620 Used

Celerity UFC-1660 Mass Flow Controller AMAT 3030-12921 Used

STEC SEC-4400M Mass Flow Controller AMAT 3030-06075 Used

STEC SEC-4400M Mass Flow Controller 200 SCCM SiH4 Used

STEC SEC-4400M Mass Flow Controller AMAT 3030-06140 Used

Celerity UFC-1660 Mass Flow Controller AMAT 3030-12922 Used

MKS Instruments 640A-15715 Integrated Pressure Controller Type 640 Used

Celerity UFC-1660 Mass Flow Controller AMAT 3030-12923 Used

Tylan 2950 Series MFC Lot FC-2950MEP5-4V untested

Fujikin MFC Mass Flow Controller FCS-4WS-798 Lot of 5

Celerity UFC-8564 Mass Flow Controller AMAT 0190-33328 Used

Aera FCPI980CBAXDIDJ?AA Mass Flow Controller AMAT 0190-34213 Used

Mykrolis DSVAD100 Digital Mass Flow Controller 4376-11000 SCCM N2 Used Working

Mykrolis AATGDAB1 Digital Mass Flow Controller 2189-4376 SCCM N2 Used Working

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-00059 Used

Mykrolis DSNAD100 Digital Mass Flow Controller 89-172 SCCM N2 Used Working

Millipore DSTAD500D501 Digital Mass Flow Controller 5000 SCCM Ar Used

Mykrolis DSLAD100 Digital Mass Flow Controller 18-34 SCCM N2 Used

Mykrolis DSTAD100 Digital Mass Flow Controller 2189-4376 SCCM N2 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02983 Used

Mykrolis DSVAD100 Digital Mass Flow Controller 4377-11000 SCCM N2 Used

Millipore DSXAD501CF01 Digital Mass Flow Controller 50 SLM N2 Used

Celerity IFC-125C Mass Flow Controller MultiFlo SC25 861-2600 SCCM N2 Used

Celerity IFC-125C Mass Flow Controller MultiFlo SC26 2601-7200 SCCM N2 Used

Unit Instruments 8165-100075 Mass Flow Controller AMAT 3030-00056 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-03263 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02946 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-09735 Used

Unit Instruments UFC-8165 Mass Flow Controller 100 SCCM SiH4 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-00886 Used

Unit Instruments 8165-100076 Mass Flow Controller AMAT 3030-00058 Used

Unit Instruments 8165-100285 Mass Flow Controller 500 SCCM SiH4 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02947 Used

STEC SEC-Z12DWM Mass Flow Controller 20 SLM NH3 Used Working

STEC SEC-Z12DM Mass Flow Controller 20 SLM N2 Used Working

Mykrolis AANGDAB1 Digital Mass Flow Controller 89-172 SCCM N2 Used

Mykrolis DSSAD100 Digital Mass Flow Controller 859-2188 SCCM N2 Used

Horiba STEC IV-2410AV Injection Valve AMAT 3870-02238 Used Working

Unit Instruments UFC-8160 Mass Flow Controller 5 SLM Ar Used Working

Unit Instruments 1660-100929 Mass Flow Controller AMAT 0227-10753 Used Working

Unit Instruments 1660-100926 Mass Flow Controller UFC-1660 AMAT 0227-10750 Used

STEC SEC-7440M Mass Flow Controller AMAT 3030-02716 Used Working

Horiba STEC SEC-4400M Mass Flow Controller AMAT 0227-04814 Used Working

Unit Instruments UFC-8160 Mass Flow Controller 10 SLM N2 Used Working

Unit Instruments UFC-8160 Mass Flow Controller AMAT 3030-03237 Used Working

Tylan FC-2902MEP5-T Mass Flow Controller AMAT 3030-04260 Used Working

STEC SEC-4400M Mass Flow Controller AMAT 3030-04702 Used Working

STEC SEC-4600 Mass Flow Controller 100 SLM N2 Used Working

STEC SEC-4400M Mass Flow Controller AMAT 0224-42723 Used

STEC SEC-4400M Mass Flow Controller AMAT 3030-04809 Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 50 SCCM NF3(0.479) Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 15 SCCM O2 Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 100 SCCM Cl2 Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 2 SLM Ar Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 10 SCCM SF6 Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 300 SCCM SF6 Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 300 SCCM Ar Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 200 SCCM HBr Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 20 SCCM O2 Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 500 SCCM He Used

Horiba STEC SEC-7340BM Mass Flow Controller SEC-7340 5 SLM N2 Used

STEC SEC-7330M Mass Flow Controller SEC-7330 1 SLM NH3 Used

STEC SEC-7330M Mass Flow Controller SEC-7330 300 SCCM O2 Used

Horiba STEC SEC-7340BM Mass Flow Controller SEC-7340 2 SLM N2O Used

Horiba STEC SEC-7340BM Mass Flow Controller SEC-7340 2 SLM NF3 Used

Celerity AATGD40W1 Mass Flow Controller AMAT 0190-19980 Used

Horiba STEC SEC-7330M Mass Flow Controller SEC-7330 2 SLM N2 Used

Horiba STEC SEC-7330M Mass Flow Controller SEC-7330 1 SLM O2 Used

Horiba STEC SEC-7330M Mass Flow Controller SEC-7330 1 SLM N2 Used

Horiba STEC SEC-7330M Mass Flow Controller SEC-7330 1 SLM H2 Used

STEC SEC-7330M Mass Flow Controller SEC-7330 200 SCCM SF6 Used

STEC SEC-7330M Mass Flow Controller SEC-7330 200 SCCM CHF3 Used

STEC SEC-7330M Mass Flow Controller SEC-7330 400 SCCM CF4 Used

STEC SEC-7330M Mass Flow Controller SEC-7330 500 SCCM Ar Used

Aera FC-7810CD Mass Flow Controller 20 SLM NH3 Used Working

Aera FC-7810CD Mass Flow Controller 15 SLM CO2 Used Working

STEC SEC-7330M Mass Flow Controller SEC-7330 30 SCCM O2 Used

Horiba STEC VC-1410 Injection Valve 200 SCCM BTBAS Used

Horiba STEC SEF-8240SM-UC Injection Valve 200 SCCM BTBAS Used

Horiba STEC SEC-4400M Mass Flow Controller SEC-4400 300 SCCM 2%CH3SiH3/H2 Used

Horiba STEC SEC-7350BM Mass Flow Controller SEC-7350 20 SLM N2O Used

Horiba STEC SEC-7350BM Mass Flow Controller SEC-7350 20 SLM N2 Used

Horiba STEC SEC-7340BM Mass Flow Controller SEC-7340 10 SLM N2 Used

Horiba STEC SEC-7340BM Mass Flow Controller SEC-7340 10 SLM H2 Used

Horiba STEC SEC-7340BM Mass Flow Controller SEC-7340 10 SLM O2 Used

Unit Instruments UFM-2000 Mass Flow Controller 20 SLM N2 Used

Unit Instruments UFC-1410N Mass Flow Controller AMAT 3030-01573 Used

Unit Instruments 3160-100017 Mass Flow Controller UFC-3160A Used Working

Tylan FC-2960M Mass Flow Controller AMAT 0225-16011 Used

Tylan FC-2961MEP5 Mass Flow Controller AMAT 0225-16006 Used

Unit Instruments UFC-1100A Mass Flow Controller AMAT 3030-01064 Used

Tylan FC280SAA 4V Mass Flow Controller 5 SCCM N2(Ar) Viton Used

Millipore FC-2900V Mass Flow Controller 10 SLM O2 Used

Unit Instruments UFC-8565 Mass Flow Controller 3 SLM NF3 Used

Unit Instruments 1665-100139 Mass Flow Controller UFC-1665 30 SLM He Used

Celerity AARGD40W1 Mass Flow Controller AMAT 0190-19978 Used

Celerity AAMGD40W1 Mass Flow Controller AMAT 0190-19975 Used

Celerity UFC-8161C Mass Flow Controller AMAT 3030-12456 Used

STEC LF-310A-EVD Liquid Mass Flow Meter AMAT 3030-07719 Used

Unit Instruments UFC-180SS Mass Flow Controller 2 SLM N2 Used

Horiba STEC SEC-Z13DMV Mass Flow Controller AMAT 0190-23910 Used

SAM SFC480F1MC-4VM Mass Flow Controller 10 SCCM SiH4 Used

Horiba STEC LV-F504P Liquid Mass Flow Controller 10g/min H2O Used

AE Advanced Energy M1-10-10-01-01-?00 Mass Flow Controller 30 SCCM WF6 Used

STEC SEC-7340M Mass Flow Controller 3 SLM H2 Used

STEC LV-310 Liquid Mass Flow Controller 0.2g/min C6H12O2 Used

Horiba STEC SEC-Z12DWM Mass Flow Controller AMAT 0190-16747 Used

Unit Instruments 1110-100006 Mass Flow Controller AMAT 3030-04694 Used

MKS Instruments 1640A-14387 Mass Flow Controller 6000 SCCM 13%O3/O2 Used

Lintec MC2100NC Mass Flow Controller 300 SCCM N2 Used

Celerity DSNGD1XM Mass Flow Controller 89-172 SCCM N2 Used

Aera FC-DN780C-BA Mass Flow Controller 20 SCCM Ar Used

STEC SEC-7450MO Mass Flow Controller 20 SLM H2 Used

STEC SEC-4500MO-UC Mass Flow Controller 10 SLM O2 Used

Horiba STEC UR-7340MO-B-UC Mass Flow Controller 5 SLM UR-7340B Used

Aera FC-PA7820C Mass Flow Controller AMAT 3030-15278 Used

Unit Instruments UTS-1000HP Mass Flow Controller 10 SCCM N2 Used

Unit Instruments UPC-1300 Mass Flow Controller 50 SCCM He Used

Horiba STEC SEC-4400M Mass Flow Controller 10 SCCM He Used

Sierra Instruments 822S-RFQ-2143-1 Mass Flow Meter 0-300 NLPM AIR Used

Unit Instruments UFC-8100 Mass Flow Controller 10 SLM O2 Used

Millipore FC-2910V Mass Flow Controller 10 SLM O2 Used

Mykrolis FC-2900V Mass Flow Controller 5 SCCM CO2 Used

Aera FC-7810CD Mass Flow Controller 3 SLM Si(CH3)4 Used Working

STEC SV-P1102 Mass Flow Controller SV-P1000 Used

Aera FC-7800CD Mass Flow Controller 50 SCCM CF4 Used Working

Tylan FC-2900M Mass Flow Controller 10 SLM O2 Used

Tylan FC-2900V Mass Flow Controller 200 SCCM N2 Used

Tylan FC-2900M Mass Flow Controller 20 SCCM He Used

Tylan FC-2900V Mass Flow Controller 1 SLM Ar Used

Tylan FC-2900V Mass Flow Controller 200 SCCM O2 Used

Tylan FC-2900V Mass Flow Controller 200 SCCM SF6 Used