几点体会和设计中应注意的问题　　

(1)采用变频控制后，实现了压缩机的软起动，减小了起动电流对电网的冲击；节电效果明显，1年内可回收全部投资。　　(2)采用PLC后，组成闭环自控系统，实现自动调节，运行更加稳定可靠。　　(3)变频器、PLC、接触器等可安装在一台控制柜内，可就地或远控操作，方式简单灵活。　　(4)系统可扩展性较好。若有多台压缩机在变频/工频供电方式下运行时，只需将增加信息或信号引至PLC，即可实现整个系统的自动控制；若生产需要，本系统也可方便接入DCS或上位机，建立人机界面的监控系统等。　　(5)预测性维护检修可大大延长压缩机使用寿命，提高可靠性，减少停车损失，降低运行费用。　　(6)PLC控制电动机在变频/工频供电方式下切换时，须保证各接触器闭合和断开顺序以及足够的延时，以防止电动机绕组产生的感应电动势加载到变频器的输出逆变桥上，造成损坏。　　(7)PLC须实现KM2和KM4间的互锁，以防止2台电动机同时变频起动，使变频器因过载而损坏。　　(8)因2台电动机会在短时间内分别在工频和变频下同时运行，故变频控制柜的总电源开关需按2台电动机负载量考虑。

Hitachi 566-5534 EVAC Control PCB PE.HV S-9300 SEM Lot of 3 Used

Hitachi 568-5590 ST Sensor PCB SS-A SS-B SEM S-9300 Used Working

Hitachi 569-5560 EM DIST PCB S-9380 SEM Used Working

Hitachi 569-5561 System Control PCB ALARMIF4 S-9380 SEM Used Working

Hitachi 569-5558 System I/O PCB N-VSCN S-9380 SEM Used Working

SMC MDUB63-E4126-20?0 Air Cylinder Hitachi 3-839272-^A New

SMC CQ2B63-01-59741 Air Cylinder Hitachi 3-823437 New

Hitachi SUNX FX7 S3-85134 Sensor and System New Surplus Lot of 4

Sensorik Sensors 3-825095 2-817089 SK SV Qty4 Hitachi

Hitachi 569-5519 EVCN3 PCB S-9300 SEM Used Working

Hitachi BBE11-01 Backplane PCB M-712E Used Working

Hitachi 568-5602 ALARM1F2 PCB S-9300 Scanning Electron Microscope Used

Hitachi 569-5520 VSCN3 PCB S-9300 Scanning Electron Microscope Used

Hitachi 569-5526 I.L.CN PCB S-9300 Scanning Electron Microscope Used

Hitachi I900SRT DC-700 Camera Adaptor Working

Hitachi S-9300 SEM Power Relay PCB 560-5530 working

Hitachi S-9300 MHVP2 PCB Power Board 560-5509 working

SRC VME Systembus SVB-10VME Backplane 100010695 Working I-900SRT

Hitachi PCA Relay Board MTIF01 Working #2201 I-900SRT

Lambda EWS50-5 Power Supply Hitachi I-900SRT Reseller Lot of 3 Used Working

Omron E5AS-R1P Temperature Controller New

Hitachi GV1 Cover 3-824791 Sealed New

Hitachi 2-821867 RF Tube Lot of 2 New

Hitachi 2-819080 Ring Gate New

Hitachi 3-833717 Base Ring 200mm Lot of 3 New

Hitachi 200mm 3-845132 Holder for M-308 Lot of 3 New

Hitachi CWS85 CWS850/2 B COM Interface Board working

Hitachi CWS87 CWS870/4 Keyboard/Mouse PCB Board working

Fuji Seiki 1012851 Throttle Valve Used Working

Hitachi Quartz Fiber 3-825664-04 New

Hitachi 3-839105 CKD Air Cylinder SCS-LND-00-140B?-69

Hitachi ZVC018-0 PCB Used Working

Hitachi RYY-1 Interconnect PCB Working

Hitachi BBDP2-01 Interconnect PCB Working

Hitachi BBET-11 Backplane Interconnect PCB FC-3000 Working

Hitachi BBDS-11 PCB Lot of 2 Used Working

Hitachi BBPS-11 PCB Lot of 2 Used Working

Hitachi ILD-02 PCB Used Working

Hitachi ILP-02 PCB Used Working

Hitachi M-712E Right Temperature Control Module CTE11-01 RKC REX-F7 As-Is

Hitachi AI0-02N Analog Input Board M-712E Working

Hitachi S-9300 SEM Stepper Motor

Hitachi 569-5512 CNCORD1 PCB S-9300 Scanning Electron Microscope Used

Hitachi 565-5506 PCB Card MAG.ADJ. S-9300 Used Working

Hitachi I900SRT Sony XC-7500 Camera Working

Tokyo Electronic Industry 3kV High Voltage Module Lot of 3 Used Working

Fuji Seiki 1012851 Throttle Valve 100mm Hitachi S-9300 Used Working

Hitachi 569-5516 ME I/F PCB S-9300 SEM Used Working

Hitachi 3-851917 SMC Air Cylinder CDQXB40-30D-A73?HS New

Hitachi 3-841739 Cosel Power Supplies K10A, K50A Qty 3

Hitachi 3-838866 PCB BBS205-3 New

Hitachi 1-807880 PCB AO08-2 New

A-B Allen-Bradley 195-GA10 Contactor 100-A38N*3 Hitachi EMO-7031 Lot of 2 Used

Hitachi 560-5533 Power Supply PCB Assembly NDEF-PS Used Working

Keyence SJ-R036C Static Eliminator Controller Hitachi I-900SRT Used Working

Hitachi S3-89145-01 SMC Air Cylinder CM2XU20-50 Qty 2

Hitachi 3-839275 SMC Air Cylinder CDQ2B100-J0736-?20 New

Huba Controls 694-91311110 Pressure Transmitter Hitachi 1-824061 New

Hitachi S2-84410 SMC Air Cylinder CDG1BN20-30 Qty 2 New

Hitachi S3-85144 Yamatake PJ7-T7 Sensors Qty 2 New

SMC ZX100-K35LZ-EC Vacuum Switch ZX Series Hitachi 3-827900 Lot of 3 New

Hitachi 3-08520489 200mm Mesh Plate New

Hitachi 3-849747 CKD Air Cylinder USSDKL63-188B New

Hitachi I-036 Nagano Keiki GC94 Pressure Gauge/Switch

KLA-Tencor KT2401 Micro Defect Inspection Tool Used Working

KLA-Tencor AIT 2 Measurement Head 0021726-001 working

KLA-Tencor AIT 2 Optics Module 0099610-000 untested

KLA-Tencor 0031663-000 Measurement Head working

KLA-Tencor Quantox 64000 #088/KE10600-M Cooling Module used working

Tencor Instruments Optics Assembly 45o PSF Driver 356662 AIT KLA-Tencor Working

KLA-Tencor Quantox 64000 Cooling Module #98/KE10600-M working

KLA-Tencor SP1 Wide Filter Assembly SP1 Filter-Wide Used Working

KLA-Tencor 509779 SP1 Narrow Filter Assembly Used Working

KLA-Tencor 0324786-000 Process Probe Wafer AMAT 0242-60400 SensArray 50-1789 New

KLA-Tencor 0035528-0000 Robot Dist. Board Rev. AA AIT UV working

KLA-Tencor AIT 2 Robot Dist. Board 530352 working

KLA-Tencor AIT 2 Lens Module 0034691-001 working

KLA-Tencor AIT 2 Timing Generator Board 0053946-000

KLA-Tencor AIT Lens Module 0034691-000 working

KLA-Tencor 003928-000 SP1 Interface Assembly Used Working

EAD Motors LA23GCKA-2P KLA-Tencor SP1 Linear Actuator Assembly 740-772820-000

Asyst 12919-002 RMT Power Box Assembly AXYS SP1 Rev. B Used Working

KLA-Tencor LPD Analog Board 0033168-001 Rev. AA Used AIT2 MIT03090131

KLA-Tencor AIT 2 LPD Analog Board 0033168-000 Rev.AB 565040 working

PRI KLA-Tencor SP1 Robot Track LTRA035-LPS Rev. 1 Used Working

Olympus BH3-5NR3-M Microscope Assembly BH2-HLSH KLA-Tencor CRS1010S working

KLA-Tencor AIT1 Olympus Microscope Assembly Working

KLA-Tencor AIT2 Heat Exhaust Blower 570-0443

KLA-Tencor SP1 Lens Module 0057637-000 Rev.AB working 0027345-000

KLA-Tencor 0024476-000 SP1 Channel Polarizer Used Working

KLA-Tencor Retrofit Optics Beamsplitter 0099602-001 New

KLA-Tencor SLX Objective Lens 760-334096-000 Untested

KLA-Tencor Cannon Box Magazine Assembly 740-060658-001

KLA-Tencor AIT APS Tower/Center Block 0071149-001 Used

KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Negative Polarity with Case

KLA-Tencor 780-14108-000 Lower Octopole/Wein Positive Polarity Lens and case

KLA-Tencor 285293 AIT 2 GPIO Board 386065 Rev.AC Working

KLA-Tencor GPIO Board 0052412-001 Rev. AA Used AIT2

KLA-Tencor AIT 1 RIGG 2214 SDP Frame Grabber 001052 SANP-9900 working

KLA-Tencor AIT 2 PSF Driver Board 556661 working

KLA-Tencor 710-663106-001 Dual Stepper Driver 2 New

KLA-Tencor 2139 Flipper Autoloader Kit 780-689642-000

KLA-Tencor 378372 SP1 CardG Power Distribution Rev. BB Used Working

KLA-Tencor MMD Housing & Fan Assembly 0032113-00 Rev.AB working 0032839-001

KLA-Tencor Glentek Electronics Analyzer 0045454-000

KLA-Tencor SLX RF Bench Assy. 740-336864-001 untested

KLA-Tencor XP Objective Lens 0110155-000 Untested

KLA Instruments Memory Controller Board 710-658232-00 Rev. H1 Used Working

KLA Instruments Processor Board 710-658046-20 Rev. E0 Used Working

KLA Instruments X Interpolator Board 710-658177-20 Rev. F0 Used Working

KLA Instruments X Interpolator Board 710-658177-20 Rev. C0 Used Working

KLA Instruments Alignment Processor Board 710-658036-20 Rev. A0 Used Working

KLA Instruments Defect Processor Board 710-658076-20 Rev. B0 Used Working

KLA Instruments Y Interpolator Board 710-658172-20 Rev. J1 Used Working

KLA Instruments Defect Filter Board 710-659724-00 Rev. C0 Used Working

KLA Instruments RIF Assembly Board 710-652840-20 Rev. E1 Used Working

KLA Instruments DF Board Assembly 710-658363-20 Rev. B0 Used Working

KLA Instruments Interface Board 710-658086-20 Rev. E0 Used Working

KLA Instruments DD Assembly Board 710-650044-20 Rev. C4 Used Working

KLA-Tencor Newport AIT3 Mask Changer 556190 New

KLA-Tencor Laser Mod 0124593-000 New

KLA-Tencor AIT UV Laser Servo Detector 0099586-001 New

KLA-Tencor 0039856-000 Dual UI Board Rav AA AIT UV working

KLA-Tencor Dual UI Board 0039856-000 Rev. AA Used AIT2

Applimotion 0040175-000 Motor Lens Assembly KLA-Tencor 0030368-000 Used

KLA-Tencor Quantox Head Control Module 64020 working

Tropel 0.7x MAG CONV Lens Stage Assembly KLA-Tencor AIT 2 Used Working

KLA-Tencor 2365 EMO Control Module 710-734976-001

KLA-Tencor Control Board 0040110-000 Rev. AA Used Working

KLA-Tencor AIT1 Ultrapointe Fast Z Controller PCB

KLA-Tencor AIT 2 Servo Box Assy. 0039978-000 working

KLA-Tencor 740-693218-001 Extron ADA 4 300MX HV 2139

KLA-Tencor 0039978-000 AIT 2 Servo Box Assembly Rev.AF working 0048081-000

KLA-Tencor SLX Chirp Cell 760-333918-000

KLA-Tencor 10KV Floodgun Assembly 720-23189-000

KLA-Tencor Aperture Heated Rod 781-23234-002 Used

KLA-Tencor Aperture Heated Rod 781-23234-001 Used

KLA-Tencor Laser Servo Detector 0062032-000 Refurbished

KLA-Tencor CRS-ABI 2000 Camera Lens Filter Assembly 002001 Working 237500-412

KLA-Tencor 64060 Distribution Module Rev. 0B Used Working

KLA-Tencor PCB AIT 2 MMD 565040 Rev.AD Analog Board working

KLA-Tencor 301 I-Line RF Bench 740-323100-002 untested

KLA-Tencor Lens Focus Assembly 374113 Used Working

KLA-Tencor 64060 Distribution Module Rev. C Used Working

Galil Motion Control DMC-2143 Assembly KLA-Tencor 2365 Working

KLA-Tencor AIT 2 UI Splitter Board 547247 AA working

KLA-Tencor AIT Laser Servo Detector Assy. 0099586-000

Tropel 142851 Lens Assembly KLA-Tencor AIT 2 Used Working

KLA-Tencor 710-680279-00 Optics Interface Board New

KLA-Tencor AIT2 UI Splitter Board 547247 Working

KLA-Tencor SLX Relay/M5 Assembly 760-333019-001 Used

KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used

KLA-Tencor Comet AMS Low Mag 0104920-003 Refurbished

Solectron REF(KE) Preamp Assembly 775-322365-000 Rev. AD Working KLA-Tencor

KLA-Tencor Control Board 0087096-002 Rev. AA Used AIT2

KLA-Tencor 200/300mm Stage Chuck 0041617-001 381870-A Used Working

KLA-Tencor Lid Lift Leg Assy. 781-11759-000 working

KLA-Tencor CRS1010 Lens Filter Assy. 000056 working

KLA-Tencor CRS1010 SDP Frame Grabber PCB 000483

Sony Power HAD Camera and CMA-D2 Camera Adaptor Set KLA-Tencor CRS1010S working