(1)PID运算功能的实现 S7-200系列中CPU215/216具有32位浮点运算指令和内置PID调节运算指令等特殊功能。使用时,只需在PLC内存中填写1张PID控制参数表(见下表),再执行指令:PID TABLE, LOOP,即可完成PID运算。其中操作数TABLE使用变量存储器VBx,用来指明控制环的起始地址;操作数LOOP是控制环号(常数,0~7)。编号为2、4、5、6、7的参数固定不变,可在PLC主程序中设定;编号为1、3、8、9的参数具有实时性,须在调用PID指令时填入
由于S7-200输入和输出为开关量,而变频器、压力变送器和振动变送器的信号为模拟量,因此EM235模块要实现D/A转换。一个EM235模块可同时扩展3路模拟量输入通道(接1路压力信号,2路振动信号)和1路模拟量输出通道(接至变频器)。 (2)起动 M1和M2各有两种起动方式,可通过转换开关选择变频/工频起动方式。 (3)运行 正常情况下,电动机M1处于变频调速状态,电动机M2处于停机备用状态。现场压力变送器检测管网出口压力(4~20mA模拟量信号),并与预定值相比较,经PLC内部专用PID指令进行运算,得到变频器所需频率信号,自动调节电动机转速,达到所需管网压力。 (4)停止 按下“停止按钮”,PLC控制所有接触器断开,变频器停止工作。 (5)切换 当需从电动机M1切换到M2时,接触器KM2断开,KM1闭合,此时电动机M1工作在工频下,在变频器完全停止后,KM4闭合,变频器重新起动,电动机M2在变频器驱动下起动;完全起动后,KM1断开,电动机M1停止,切换操作结束。电动机M2切换到M1过程类似。
Lam 4420 Etcher CRT Keypanel Chassis Assembly 852-017500-003-?C-LFAW Used Working
Lam 4420 Etcher CRT Keypanel Chassis Assembly 852-017500-003-?B-C220 Used Working
Force Computers 310004 PCB Card SYS68K/SIO-2 LAM 4420 Rainbow Used Working
Force Computers 102205 PCB Card SYS68K/CPU-6A/C?3 LAM 4420 Used Working
LAM Research 11021-1-D-00332?136 Loadlock Chamber 853-012-123-001?-I-DFT Used
Lam 4420 11200-3-E-00182?139 Loadlock Chamber 715-130080-008 working
Lam 4420 852-011061-506 Reaction Chamber Assembly untested as-is
Lam 4420 852-011061-503-?C-CHMAIN Reaction Chamber Assembly untested as-is
Lam 4420 852-011061-503-?B-CA8CH Reaction Chamber Assembly untested as-is
Force Computers 880-12535-101.A?1 PCB Card LAM Research 4420 Used Working
LAM Research 852-011201-3030?-B-230 4420 Chamber Robot Entrance Loadlock Used
LAM 4420 Etcher Operator Panel 852-017500-003-?4 working
Lam Heartbeat Board 810-017012-001 working
LAM 4420 Etcher CPU PCB 880-12537-101.A?2 Working
LAM Research Etcher Wafer Shuttle Assembly 853-012500-001
LAM 4420 Etcher Input Side Loadlock
LAM Research 852-011061-503-?C-CHMN Lower Chamber Assembly 4420 Etcher As-Is
LAM 852-011060-503-?F-CH9M Reaction and Lower Chamber Assembly 4420 As-Is
LAM 852-011060-103-?9-231S Reaction and Lower Chamber Assembly 4420 As-Is
Force Computers 810-017038-002.?B PCB Card SYS68K/SIO-2 Used Working
LAM Research 853-012123R001 REV.I Harmonic Arm Drive LAM 4420 Used Working
LAM Research 853-012123-001-?I-LLFDR Harmonic Arm Drive LAM 4420 Used Working
LAM Research 852-017500-003-?C-LEAN CRT Keypanel Chassis Lam 4420 Etcher working
Lam 4420 Reaction & Lower Chamber 852-011061-103 Lower Match Box 860-010110-013
LAM 4420 860-010110-013 Reaction & Lower Chamber Assembly 853-011141-003 as-is
LAM 4420 Etcher Outer Gate Assembly 853-140013-001-?1-230S Working
Deltron Lam 4420 DC Power Supply V300B15 853-017230-001 Used Working
LAM Research 852-017500-001-?D CRT-Keypanel Chassis Assembly 853-017505-001-?B
LAM 4420 Etcher 852-017500-003-?4 CRT-Keypanel Chassis Assembly 853-017505-001-?C
LAM Research 4420 Solenoid Tray Assembly 853-013610-001-?D Used Working
LAM Research 4420 Solenoid Tray Assembly 853-013610-111-?1-C222 Used Working
LAM Research 4420 Solenoid Tray Assembly 853-013610-001 Rev. E Used Working
Lam Research 4420 852-011061-103 Lower Chamber Assembly 853-025103-003 as-is
LAM Research 810-17013-001 Gap Drive Amplifier 4420 Interlock PCB Rev. C Working
Force Computers Lam 4420 SASI-1 Board 890-14443-101 Rev. A Used Working
Force Computers Lam 4420 Interface PCB 300000 Used Working
Force Computers 880-12537-101.A?2 PCB Card LAM 4420 Used Working
LAM Research Etcher Outer Gate Assembly 853-012350-002-?F-230 Working
MRC Step Control I/F Board 884-55-000 Rev.A DIP Board working
Force Computers 890-14425-101 PCB Card SYS68K/CPU-6VB/?C3 Used Working
Force Computers CPU-6VB Board 600-11315-301 working
Deltron Lam 4420 DC Power Supply V300B 853-017230-001 Used Working
LAM 4420 Etcher 853-012200-002 Inner Gate Valve Drive working
LAM Research 4420 Heartbeat PCB Board 810-017012-002 Rev. 3 Working
Lam Solenoid Interlock Board 810-17004-001 Rev.D working
LAM Research 4420 Etcher Heartbeat PCB 810-17012-002 Working
LAM Research 4420 Heartbeat PCB 810-17012-002 Rev.2 Used Working
LAM Research 4420 Heartbeat PCB 810-17012-002 Rev. 3 Used Working
LAM 4420 Etcher Inner Gate Valve Drive 853-01220-002-G?-230D Working
LAM Etcher Inner Gate Valve Drive 853-01220-002 Rev J Removed From 4420 Working
LAM Etcher Inner Gate Valve Drive 853-01220-002-H?-230S Removed From 4420 Working
LAM Etcher Inner Gate Valve Drive 12200-2-D-00302?064 Removed From 4420 Working
LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-?G-VAC Working
LAM Research 853-012200-002-?G-230S Inner Gate Valve Drive 4420 Used Working
LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-?H-DFT Working
Mykrolis AC-2 Valve Controller 796-006238-001 REV:L Used Working
Lam 4420 Tylan AC-2 Rev.K Valve Controller 796-006238-001 Rev.J working
Lam 4420 Tylan AC-2S11A Valve Controller 796-006238-011 Rev.B working
Lam Wasco Inc. 100TORR Vacuum Switch SV129-31W2A-X/6?686 new 853-01780-002 lot
LAM Research 7.98" Diffuser Disc 716-011505-001 New
LAM Research 853-013610-111-?2-C222 Solenoid Tray Assembly LAM 4420 Used Working
LAM Research 810-017003-004 DIP High Frequency Board LAM 4420 Used Working
LAM Research 4420 853-012550-001-?D Wafer Shuttle Assembly working
LAM Research LAM 9100 ADIO-A0 Control Board 310-170314 Rev. A Working
LAM Research LAM 9100 ADIO-A0 Control Board 810-17031-004 Rev. 1 Working
LAM Research LAM 9100 ADIO-A0 Control Board 810-17031-2 Rev. 1 Working
LAM Research LAM 9100 ADIO-A0 Control Board 810-17031-3 Rev. 2 Working
LAM Research LAM 9100 ADIO-A0 Control Board 810-17031R4 Rev. 1 Working
Lam Research Transfer Arm 15-024611-00 Rev. C Used Working
Lam Research 4420 4 Pin Lifter Filter 853-017435-001-?A-1996 Used Working
LAM Research 852-011060-503-?D-CHMAIN Upper Chamber Gap Housing Assembly Used
LAM Research 852-011060-503-?A Upper Chamber Gap Housing Assembly 715-011005-001
Lam 4420 Shuttle Assembly 853-012550-001-?D Used Working
Xycom 70113-001H Memory Board Lam 4420 Used Working
LAM Research 853-017160-583-?B-LEAN Rear EMO Assembly PCB 810-017003-004 Used
Force Computers 300000 PCB Card SYS68K/SASI-1 LAM 4420 Used Working
LAM 4420 Solenoid Tray Assembly Missing PCB 853-013610-501-?A-LEAN Used Working
LAM Research 4420 Solenoid Tray Assembly 853-013610-001-?D-C222 Used Working
LAM 4420 Solenoid Tray Assembly Missing PCB 853-013610-001-?E-LEAN Used Working
LAM 4420 Solenoid Tray Assembly Missing PCB 853-013610-001-?D Used Working
LAM 4420 Solenoid Tray Assembly Missing PCB 853-013610-001-?E-4050 Used Working
Lam Research 4420 ADIO A0 PCB 810-17031-2 Rev. 2 Used Working
Lam Research 4420 ADIO A0 PCB 810-17031-4 Rev. 2 Used Working
Lam 4420 Shuttle Assembly 853-012550-001-?H Used Working
Lam 4420 Shuttle Assembly 853-012550-001 Used Working
LAM 4420 Etcher Solenoid Tray Assembly 853-013610-001
LAM Research Etcher SRAM PCB 70113-003 Rev K Working
LAM Research 853-012095-008 200mm End Effector New Surplus
LAM Research 71110B1-001 SRAM PCB 70110-003 Used Working
LAM Research 853-017160-002-?F-1273 Rear EMO Assembly LAM 4420 Used Working
LAM Research 853-013610-501-?A-LEAN Solenoid Tray Assembly LAM 4420 Used Working
LAM Research 853-013610-001-?D Solenoid Tray Assembly LAM 4420 Used Working
LAM Research Wafer Shuttle Assembly 4420 853-012550-001-?F-C222 working
XYCOM 71113A-001 RTC Port & SYSFAIL SYSRESET PCB Used Working
Lam 4420 ADIO-A0 Control Board 810-17031-2 working
LAM Research 4420 ADIO-AO Control Board 810-17031-R4 Rev. 1 Used Working
Ceramic Tech 719-250922-001 Dark Spacer Shield Refurbished
LAM Research 4420 Upper Chamber Assembly Parts 853-011117-001 010250C1-AO01E
LAM Research 716-011830-008 Focus Ring Alumina Wafer Clamp LAM 9600 New
LAM Research 716-330122-002 Top Ceramic Plate F/G LAM 9600 New
Schlumberger C/H Comparator Board 97911054 Rev. 4 Used Working
LAM Research I/O Breakout Board 810-17002-001 Rev. D Used Working
Lam Research 4420 Endpoint Detector 853-001983-005R?P-1367 Used Working
Lam Research Blank Cover 713-21816-1 Rev.B
LAM Research 853-001983-010 Endpoint Detector 4420 Rev. T Used Working
Lam 4420 Solenoid Interlock PCB 810-017004-001 Rev.E working
LAM Research 810-17012-001 Heartbeat Board Rev. F 4420 Used Working
MKS Instruments 100997144 Isolation Valve 839-13521-1 Rev. D LAM 4420 New
Lam 4420 Anafaze 11230-00 MLS Host Communication Board 11235-50 working
LAM Research 853-013610-001-?D Solenoid Tray Assembly LAM 4420 Used Incomplete
LAM Research 810-17012-001 Heartbeat Board Rev. D 4420 Used Working
Lam Research 4420 Solenoid Interlock Board 810-017004-001 Rev. F Used Working
Lam Research 853-013540-002 Heated Manifold Chamber new
LAM Research Opto Output PCB 28-8875-036 New
LAM Research Opto Input PCB 28-8875-037
Lam 4420 Angle Valve Assembly 853-013542-002-?C-LEAN working
LAM Research 4420 Tri-Convectron Interface Assembly 853-017620-001 working
Deltron Series V300 Power Supply V300B Working 853-017230R001 LAM 4420
LAM Research Front EMO Box Assembly 852-017152-003 Rev. G Working LAM 4420
LAM Research 1-1/2" Isolation Valve 839-013521-001 Working LAM 4420
LAM Research 4420 853-013541-002 Heated Throttle Valve Assembly Rev.C working
CMHT-11S02 Tylan 853-011054-001-?E Manometer Rev. C Used Working
LAM Research 4420 Etcher Wafer Transport 853-012726-001-?G-C222 Incomplete As-Is
LAM Research 853-013542-002-?1-230S Angle Valve Assembly 4420 Used Working
Lam Research Focus Ring 055298 ACE BS33-390 new
Deltron V300B15 DC Power Supply Lam 4420 853-017230-001-?C-220 Used Working
LAM Research 13610-1-B-5149 Solenoid Tray Assembly missing PCB LAM 4420 used
Lam 4420 Tri-Convectron Interface Assembly 17620-1-A-4318 Used Working
LAM Research 4420 853-017620-001-?A-222 Tri-Convectron Interface Assembly working
Lam Research 4420 853-017620-001-?A Tri-Convectron Interface Assembly working
Lam Research 4420 853-017620-001-?A-C222 Tri-Convectron Interface Assembly used
Millipore CMHT-11S02 Manometer Lam 4420 853-011054-503-?1-LEAN Used Working
Millipore Lam 4420 Manometer CMHT110232E Used Working
Millipore Lam 4420 Manometer CMHT-11S02 853-011054R001-?E Used Working
Millipore Lam 4420 Manometer CMHT-11S02 853-011054-001-?E-PCBEI Used Working
Millipore Lam 4420 Manometer CMHT-11S02 853-011054-001-?F-ECM Used Working
Millipore Lam 4420 Manometer CMHT-11S02 853-011054-001 Rev. D Used Working
Millipore Lam 4420 Manometer CMH4-M11S02 853-011054-R001 Rev. A Used Working
Lam Research 4420 Stepper Motor Driver 810-17016-1 Rev. B Lot of 7 Used
LAM Research 810-17018-002 Gap Motor Control Board Used Working
Millipore CMHT-11S02 Manometer LRC 685-008451-001 Rev. D Working
LAM Research 716-330167-281 Ceramic Bottom Ring Clamp 420D0019 Refurbished
LAM Research 715-330151-004 ACTR Flange Ring 420D0027 Refurbished
LAM Research 716-330162-002 BAC Ceramic Filler Ring Flange 420D0018 Refurbished
Rofin Starcut SC Disc 100 ICQ Baasel Lasertech Laser Innolas ILS 700P Working
Jenoptik 4022.454.9932.2 ASML BP Mirror 193nm new
JDS Uniphase Laser 2214-20SLUP 458-515nm 0.50W
Coherent 1127985 Laser Discharge Unit AMAT 0190-B0150 Refurbished
Coherent 3-32-0025-000 Laser Assembly SSS LUFT V2.2 KP 1000 Used Working
Agilent Hitachi S-9300 Laser Assembly 5517B 580uW Used Working
Laytec 35-0610-2009 Curve Optical Head EpiCurve TT Used Working
Laytec 35-0609-2009 Curve Optical Head EpiCurve TT Used Working
Laytec 2008-083 Curve Optical Head EpiCurve TT Used Working
Therma-Wave Opti-Probe 2600B Optics Platform OP200B KLA-Tencor As-Is
Newport Optical Assembly 8017-1027A New
Coherent 1145043 Laser Discharge Unit AMAT 0190-B0160 Used Working
Jenoptik 4022.456.0076.2 BXP Lens ASML Cymer New
Jenoptik 4022.456.0075.2 Twinscan 1100 Lens ASML New
Neuner Elektrotec Coherent SSS LUFT V2.2 KP 1000 Laser Discharge Unit 0190-B0150
Jenoptik 760-32282 Cylindrical Lens 3 AMAT 2010302 New
Therma-Wave TP-420 Laser Power Supply 208V 20A Single Phase working
Spectra-Physics 2560-56 Laser Power Supply rebuilt
Sti OF4172B-2 OptoFence Series Light Curtain Set Lot of 2 Used Working
Melles Griot S1092 Diode Laser Assembly Opti-Probe OP2600B Used Working
Lexel Laser 00-143-502 Model 85S Laser Controller SVG-859-5163-00?5 Working
Melles Griot 9154-01001 Diode Laser Assembly Opti-Probe 2600B Used Working
Spectra-Physics Laser 163-A1226 200mW Class 3B
Sunx Beam Sensor LA-A1 LA-310P LA-310D working
Omron Beam Linear Sensor Z4LA-L10 Z4LA-D1030 working
Sti OF4100B-2 OptoFence-B Light Fence Set with Cables OF4172B-2 Used Working
Newport Right Zoom Assembly 8017-1039-000 new, sealed
Nikon Hama Wafer Mapping Sensor KAB11310/201K New
Omega RD6111 Single Channel Flatbed Recorder AC/DC Voltages & Currents New
Parker Laser Stage Positioning System Model 4082
Newport Optical Measuring Assembly 8026-0231D New KD-5100
Sony Laserscale Interface BZ-T13 Working
HP Hewlett-Packard 05501-69030 Laser Head ETEC 0712-8116-009 Mebes 4500 Used
HP Hewlett Packard 5517D Laser Head 345uW Used Working
Agilent Technologies 5517D-C29 Laser Head 78uW Used Working
Agilent Technologies 5517D-C19 Laser Head 296uW Used Working
Agilent Technologies 5517D Laser Head 282uW ASML 4022.454.71615 Used Working
Uniphase 1135P-3348 Industrial Laser Used Working
HP Hewlett Packard 5517D Laser Head 343uW Used Working
SunX EX-13EA-PN Sensor Photo Through-Beam Reseller Lot of 50 New
Merlin Gerin 50440 Toroid Sensor MA120 TA 120mm Lot of 10 Used
Sunx Digital Fiber Sensor FX-301H Lot of 12 New
Coherent 1127985 Laser Discharge Unit AMAT 0190-B0160 Untested As-Is
Coherent LDU-ESI-OEM-AMA?T Laser Discharge Unit 1121618 AMAT 0190-B0160 As-Is
Omron Photoelectric Sensor Set Z4LC-S28 Used Working
Spectra-Physics Laser Power Supply 263 283-A01
HP Hewlett-Packard 10780F Remote Receiver Interferometer Lot of 14 Working
TEL Unity 2 Laser Assembly MLXS-D12-670-3 Lot 2