2设计要考虑信号的特殊性，确保信号的可靠。

　　1）设计时须充分考虑设备停机的可操作性，所谓停机可操作性就是设备必须紧急停机或控制回路故障时能可靠停机。如图3所示，SB4常闭触点作为PLC输入信号，当SB4回路断开或SB4接触不良或失压时，KM断开输出，从而可以确保设备不出现无法停机情况。而在我公司的多项工程之中，都是采用常开触点作为停机信号输入，如果出现上述故障时，设备将无法停机，后果不堪设想，严重时甚至威胁设备的安全运行。例如：我公司的高压电机控制系统，采用的是总降单柜控制电机（即车间不设高压柜），系统运行由设在车间的机旁按钮控制，停机按钮采用常开点控制，系统在运行过程中出现多次无法停机，最终只能电话通知总降手动停机，经查原因多为停机按钮接触不良所致。经与设计单位商讨后，决定在同类控制回路的停机按钮全改为常闭触点，至今无出现过类似故障。

2）设计过程控制，要充分考虑现场振动，控制信号采集后必须经过防抖过滤，以减少现场输入信号抖动引起误动作。如水泥粉磨系统中的油站系统信号，都是安装在磨机旁边，现场振动大，输入信号处理不当时，极容易造成系统瞬间动作。 如图4所示：X002油压低报警信号有输入时，经过1s延时后输出联锁跳闸，而只要X002信号科动频率在1s之内，Y001就不会动作，这样就可以确保输入信号的质量。

AMAT Applied Materials AMAT-1 Heat Exchanger 0010-37054 Rev. A As-Is

AMAT Applied Materials AMAT-1 Heat Exchanger 0010-70067 Rev. B As-Is

AMAT Applied Materials AMAT-1 Heat Exchanger 0010-70067 Rev. F As-Is

AMAT Applied Materials 0195-08438 Disk Brush Driver Enclosure Used Working

AMAT Applied Materials 0290-76088 P5000 Remote AC Box Rev.V working

AMAT Applied Materials 0010-76036 System Mini-Controller Precision 5000 As-Is

Applied Materials AMAT 0010-22569 Chamber Assembly 409909-P4-ECH2 Rev 001 Used

AMAT Spur Gearing Pressure Drive 3970-00039 working

AMAT Applied Materials 0021-53986 Lower Shield new

AMAT Applied Materials 0040-52495 300mm Bottom Chamber Adapter new

AMAT Applied Materials 0010-02146 RPSC Applicator with D13604 Waveguide Working

AMAT Applied Materials 0010-21745 Endura 5500 Operator Control Panel Used

AMAT Applied Materials AMAT-1 Heat Exchanger 0010-70067 Rev. H As-Is

AMAT Applied Materials 0010-09750 CVD RF Match Rev. F working P5000

Parker/Hauser 102-0004 Right Vertical Drive Unit HPLA Linear Actuator 0190-24358

Parker/Hauser 103-0004 Left Vertical Drive Unit HPLA Linear Actuator 0190-24357

Semiquip AMAT Centura Endura 200mm Cassette Alignment Tool LCAT200P-20001 used

AMAT Applied Materials 0010-12802 300mm Titan-I Head Edge Fast Tungsten Process

AMAT XR80 Implant Power Distribution Unit 9090-00194ITL

AMAT Endura Upper Shield 0021-17722 new

Tosoh AMAT Centura Upper Shield 805-377-TA-F-10?4 new

Delatech 814-01-034 Spec Multinozzle Inlet Assembly AMAT 0190-18291 Used Working

AMAT 0010-08322 Top Local RF Match Rev.002 used working

AMAT Applied Materials 0010-08322 Top Local RF Match Rev.003 used working

AMAT CMP Polisher Kit 0240-06458 new

AMAT Applied Materials 0010-29563 Mirra 300mm Titan Head 0724-STI Refurbished

AMAT Applied Materials XR80 Heat Exchanger W-DA90LM-C working

Adlink Technology cPCI-3720TB/P82 Single Board Computer AMAT 0190-28791 Used

AMAT Applied Materials 9090-00945 ITL MAG PSU Assembly XR80 Used Working

Applied Materials AMAT RF Match Assembly 0010-35937 Used Working

AMAT Applied Materials Centura 300mm Mainframe AC As-Is

Applied Materials AMAT 422527-P4-PROJ 300mm 32x.300 Magnet 0010-24485 New

AMAT Applied Materials 0040-64000 Next Gen Cathode 300mm Emax Bulkhead New

STL Transformer 1360-90103 AMAT Applied Materials XR80 Transformer Working

SIG Positec VRDM 5913/50 LNB XR80 Motor Assembly 02992010050 Working

AMAT SBC Computer Board Dual 1 GHz 0660-A1250 working

AMAT SIP, TA 300mm Refurbished Kit

AMAT Applied Materials 0040-48435 300mm Upper Chamber Adapter new

AMAT 1 Applied Materials Heat Exchanger used as-is

AMAT Applied Materials 0010-44281 Gas Delivery System Used

AMAT XR80 Implanter Vacuum Controller 0090-91927 ITL

AMAT XR80 Implanter Cryopump Controller 9090-00246 ITL

AMAT Applied Materials 0195-09094 SYCAMORE Polisher I/O Assembly New

AMAT Applied Materials 2010345 GF Mirror 4 New

Quality Transformer and Electronics 7323 XFMR Transformer AMAT 0190-06937 New

AMAT Applied Materials 0270-05669 Neon Gas Spring Tool Compression New

Applied Materials AMAT 0020-30628 Vespel Clamp Ring New

AMAT XR80 Micro Discharge Sense Box X2HA 0090-91422

AMAT XR80 Implanter Controller 9090-00098 ITL working

AMAT XR80 Implanter Controller 0090-91404 ITL working

AMAT XR80 Power Distribution Unit 9090-00511 ITL

AMAT XR80 Power Distribution Unit 9090-00194 ITL

AMAT Applied Materials 9090-00742ITL Beamline Monitoring Module Rev. B Working

AMAT Applied Materials 9090-00742 Beamline Monitoring Module Rev. D Used Working

Edwards Shutter Disk 633-5583-66 AMAT Centura 0021-17725

AMAT XR80 Implant Spin Relay Controller 0090-93095 ITL

AMAT Applied Materials 0010-45533 LDM Megasonic Onboard Mixing Assembly new

AMAT XR80 Implant Gap Servo Controller 0090-91251 ITL

AMAT Controller Distribution Board 0100-00523 Working

AMAT XR80 Implant Gap Servo Controller 9090-00097 ITL

AMAT 200mm Cover Ring AL 0020-24719 new

Tosoh AMAT Endura Lower Shield 805-435-SG-F-25?8 new

Tosoh AMAT Endura Inner Shield 805-381-SA-F-30?1 New

AMAT Applied Materials 0010-13321 8" Robot P5000 Untested As-Is Precision 5000

AMAT Applied Materials 0090-06254 Centura ACP Remote Assembly New

AMAT Applied Materials 8310 Hexode Assembly 100mm Used Working

Applied Materials AMAT 0010-09574 Pedestal 125MM Flat New

AMAT Applied Materials 0020-31147 Base Insert new

AMAT 0010-08322 RF Top Match Rev.002 used not working

AMAT Quantum Leap III Power Distribution Box 9090-00482

AMAT XR80 Controller 0090-91694 ITL working

Applied Materials 37222302 9ft Industrial Brush AMAT 0190-29777 New

AMAT Applied Materials 0180-02403 300mm Radiance Chamber AC Incomplete, As-Is

AMAT Applied Materials 0242-41577 Shutter Kit 300mm New

AMAT Applied Materials 0040-13509 Quartz Bell Jar ZCoat Preclean 300mm New

Applied Materials AMAT Cassette Alignment Tool Controller LCAT200P Used Working

AMAT Applied Materials 0270-03850 300mm Top Cover Ship Assembly new

AMAT Applied Materials 0240-47946 300mm Target Locking Device Retrofit Kit new

AMAT Centura Clamp Ring 0020-52627 refurbished

Edwards Kachina 0020-13067 300mm Lower Shield refurbished AMAT Centura

AMAT XR80 Implanter Gas Box (Single) 9010-00163ITL working

Applied Materials AMAT 0240-48741 300mm Legacy PMR Target Locking Kit New

ETO Bias RF Watt Meter ARX-X268 0190-36681 ABX-X363

ETO RF Watt Meter ARX-X268 ABX-X363 0190-36681

AMAT O-Ring 10.178 x .112 Si 3700-02952 Lot of 26 New

AMAT Applied Materials 300750-108-TR04?461-043 Turbo Controller AC Box 0090-04461

ETO RF Gen2.3MHz WattMeter ABX-X363 ABX-X277 0190-36679

AMAT Applied Materials ATM-20 Matsushita Triple Laser Operator Terminal Used

AMAT Applied Materials AMAT-1 Heat Exchanger 0010-70067 Rev. D As-Is

AMAT XR80 Implanter Magnet Controller 9090-00086 ITL

AMAT Applied Materials 0190-33038 Heater Jacket UAPM13565RSN-27?4 Lot of 7 New

AMAT Applied Materials 2010342 GF Mirror 3 New

AMAT Applied Materials ATM-20 Dual Laser Operator Terminal Endura Centura Used

AMAT Applied Materials 0010-09001 P5000 System Electronic Assy. working

AMAT Applied Materials 0100-02784 MOCVD CDS Interlock IO Distribution Board new

AMAT Applied Materials 0200-07814 Shower Head new

Tosoh Endura 5500 Target 4029H-13-109-50?1 New

AMAT XR80 Vacuum Interface 9090-00102 ITL working

AMAT Applied Materials 0035-00193 Shield new

AMAT Applied Materials 0010-00742 End Point Keyboard Rev. A new Precision 5000

Applied Materials AMAT 0190-03359 Feed Through Motor Used Working

AMAT Applied Materials 0140-19341 Harness Assembly Lamp Outer Zone Neon New

AMAT Applied Materials IL100A Fuse Box Power Unit Used Working

AMAT Applied Materials 8100D System DC Power Supply 01-81913-00 Rev.E working

Motech AMAT XR80 Implanter Voltage Clamp Unit 0090-91598

Tosoh AMAT Endura Shutter Disk 805-438-TA new

AMAT Applied Materials SIP TTN 300mm Adapter Kit 0240-62572 New

AMAT Applied Materials 0242-21251 Endura 300CL Robot Harness Kit 3 Cables New

AMAT XR80 Implant CD52/A Voltage Clamp Unit 0090-91598

Applied Materials AMAT Slit Valve External Insert Piece 0040-41887 Lot of 3 New

Motech CD51/E Voltage Clamp Unit AMAT 0090-91123 XR80 Implant

AMAT Carriage Assy Gate Valve 3870-00716 New

AMAT Applied Materials 0100-35148 Two Chamber Gas Backplane Board Rev.P1 working

Tosoh AMAT Endura Upper Shield 805-375-SG-F-31?0 new

Applied Materials AMAT CPCI Dega Retrofit Kit 0240-54629 New

Tosoh AMAT Endura Upper Shield 805-377-TA-F-15?7 new

AMAT Applied Materials 0200-07667 GA Quartz Support Liner new

AMAT Applied Materials Centura 300mm Mainframe AC 0190-17342 missing parts as-is

Applied Materials Pneumatic Valve Assembly 9010-00069 Working

AMAT XR80 24VDC Relay Module Model 4020 Untested

AMAT Titan 300mm Fixture Kit 0240-13190 new

Tosoh AMAT Endura Upper Shield 805-377-SA-H3 new

AMAT Applied Materials 0246-02702 300mm E2 Particle Ring and Cryo Shield Kit new

AMAT Applied Materials 3320-01026 10 CFF OFC Copper Gasket lot of 5 new

AMAT Endura Shutter Disk 0020-29157 new

Price Pump Endura Vertical Pump CD100VSS-494 new

AMAT Applied Materials 9090-00785 High Voltage Module 3X2H XR80 Used Working

Applied Materials AMAT Wafer Calibration Tool 4mm 0270-03972 New

AMAT Applied Materials 0021-25668 300mm HTESC Shutter Disk Rev.003 new

AMAT Applied Materials 0040-85691 Shutter Garage Assembly Rev.001 working

AMAT Applied Materials 0190-35602 720W - 120V Halogen Heater NEW (20 Lot)

AMAT Centura Shield Clamp Edwards 0021-15610 refurbished

AMAT Applied Materials Centura Inner Shield 300mm 0020-52600 new

ASTeX ETO ABX-X348 SSD Driver Board ARX-X267 Rev. E Refurbished

AMAT Applied Materials 0010-24988 Shutter Garage Housing Assembly new

AMAT Applied Materials 0242-31851 Power Supply Assembly New

Applied Materials AMAT 300mm PVD 32x .300 Magnet Ring 0040-85322 New

Applied Materials AMAT Single Zone Heater 300mm Kit 0242-17788 New

AMAT Applied Materials 0150-17462 Watlow Regal N2 Heater Used Working

Applied Materials AMAT HDPCVD 300mm Distribution PCB 0100-02275 Used Working

AMAT Applied Materials 0225-05707"XB" 6" Focus Rings ACP Lot of 25

AMAT Applied Materials 00220980104 Microscope Nosepiece AMAT 1120-00489 New

AMAT Applied Materials XR80 Power Supply 0090-91649 Rev.B working

AMAT Applied Materials 13-01-01 Fiber Optic Cable Assembly AMAT 2040010 New

AMAT Applied Materials 0270-03420 200mm Hoop Calibration Wafer new

Supermicro AMAT Appiled Materials Assembly Motion Metrology Server 0090-05824

AMAT Applied Materials 0090-91409 Beamline Interlock Box Rev.A working

AMAT Applied Materials 0200-07641 Ceramic Shower Head New

AMAT Applied Materials Quartz Focusing Ring 0200-09741 New sealed

AMAT Applied materials 0020-33880 Holder Insulation R2 New surplus

AMAT Applied Materials 0020-33879 R2 STD Cathode New

AMAT Applied Materials 0250-09623 Anodized Gas Distribution Plate New surplus

Semicon Precision Industries A-1402 Lower Shield Assembly new

AMAT XR80 Beamline Interlock Box 0090-91409 ITL working

Applied Materials AMAT 650247 Lid Flange 0010-15222

AMAT Applied Materials 0130-11002 Digital I/O Board 0100-11002 Rev. F Working

AMAT Applied Materials 0270-03260 300mm Cooling Plate Lift Fixture new

Applied Materials AMAT Airflow Valve Controller 0010-92510 ITL Used Working

AMAT Applied Materials 0130-01244 Smoke & Water Leak Detector PCB Rev.002 used

Applied Materials AMAT Pillow Block Kit 300mm 0240-42339 New

Applied Materials AMAT ESC Remote Box Assembly 0010-14507 Used Working

AMAT Applied Materials 0620-04248 RF Cable 79 Ft. 2MHz New

AMAT Applied Materials 0240-50175 Endura2 CVD Gasbox Dual Exhaust Kit new

AMAT Applied Materials 9240-04481 ITL Grounding Bar Assembly Lot of 2 Used

AMAT Spliced O-Rings 300mm 0190-15796 Lot of 9 New

Pentagon Technologies PT-0643-0013 Quartz Bell Jar Endura 8" PVD New

AMAT Applied Materials 330T0296-01 IPA Vapor Generator ASM Raider Used Working

AMAT Applied Materials 0150-17460 Regal Vapor Generator With Jacket Used

AMAT XR80 Argon/Oxygen Bleed and Charge Monitor 0100-94078 Rev. A Used Working

AMAT Applied Materials 0041-00186 300mm Gas Ring new

AMAT Applied Materials 01-82622-00 5" Platen Aluminum Pedestal Assembly lot of 9

AMAT Applied Materials 0100-11003 Stepper Drive Board Rev. C Working P5000

AMAT Stepper1 PCB 0100-00003 Working

AMAT Applied Materials 0100-00003 VME Stepper Drive Board Rev.C working

AMAT Valve Manifold Assy. 16 Station 4060-01172 new

AMAT Applied Materials 0021-09178 Outer Can MXP+ New

Applied Materials AMAT 0021-09179 Rev. P1 Inner Can Assembly New

AMAT Applied Materials 0020-42112 200mm Aluminum Lift Cylinder new

AMAT 0100-94037 Loadlock System Control Panel Used Working XR80

Applied Materials AMAT 0090-35766-P1 5" DPS ESC Used

Applied Materials AMAT 0020-28615 Shield 8" Low Knee New

Applied Materials AMAT 0200-00156 Shadow Ring New

AMAT Quantum Leap III Contacter Drive 0100-90385

AMAT XR80 24V Power Supply Board 0100-90025 working

AMAT Titan SP Head 300mm Fixture Kit 0240-13190 new

AMAT Applied Materials 0021-16287 Lower Narrow Neck Shield 300mm New

AMAT Applied Materials 0041-24879 ALD TAN Lid Cap 300mm new

Applied Materials AMAT Vacuum Roughing Line Matrix Kit 0227-05061 New

AMAT Applied Materials 0242-70282 300mm Vacuum Roughing Line Kit new

AMAT Applied Materials 0010-26776 300mm Target Gravity Safe Lock Right new

AMAT Applied Materials 0010-26777 300mm Target Gravity Scale Lock Left Assembly

Applied Materials AMAT Control Module 9090-01161 XR80 Used Working