常用于ASMDIE/WIREBONDER粘片机上AB559559A等邦机XYZ轴驱动TAMAGAWAMOTOR常用型号:60WDCSERVOMOTORTS1982N53E6 02-14692 60WDCSERVOMOTOR TS1982N56E18 02-15308 100WDCSERVOMOTORTS TS1981N56E1958-100071.8STEPMOTOR E22NRFT-JDN-NS-02;02-15180编码器:LBK-011-1000;1000P/RAB559马达60W100W